RF POWER TRANSMISSION DEVICE

RF POWER TRANSMISSION DEVICE

申请(专利)号： KR20020046095

专利号： KR20040013246A 主分类号： H01L21/00 申请权利人： SAMSUNG

ELECTRONICS CO., LTD. 公开国代码： KR 优先权国家： KR

摘 要：

PURPOSE: An RF power transmission device is provided to omit an unnecessary process step and reduce work time by fastening a nut while an RF supply copper fixing unit of an RF supply assembly is held by a tool. CONSTITUTION: A

spindle assembly of a disc type can rotate on a plate. A plurality of spindle forks are formed in the outer circumference of the spindle assembly. A plurality of heater power and heater blocks are formed on the plate having the spindle assembly. The RF supply copper(30) is installed in the RF supply assembly. A chamber as a cover is installed in a position over the RF supply assembly to maintain a vacuum state of the spindle assembly. A heater block part(31) is connected to the heater block. A body part(33) of a bar type is installed under the heater block part. A bolt part(34) into which a nut(35) is

inserted is formed in the lower part of the body part. A fix part(36) is inserted into the lower portion of the bolt part by using a tool.

申请日： 2002-08-05 公开公告日： 2004-02-14

分类号： H01L21/00 发明设计人： KIM, YONG SAM

申请国代码： KR

优先权： 20020805 KR

20020046095

摘 要 附 图：

主权项：

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权 利 要 求 说 明 书

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