N/A[ ] ADD[ ] REF[ ] Leakage current testing was performed with acceptable results. See Attachment One for results. Testing indicated a ground impedance of less than ohms between the grounding circuit and the conductive system components which house electrical assemblies. See Attachment Two for results. MEETS [X] ISSUE [ ] INFO REQUIRED [ ] RESPONDED [ ] N/A[ ] ADD[X] REF[ ] All of the electrical components that were added to the system in order to achieve the integrated Mirra Trak system are NRTL approved and used appropriately within their ratings or provided with acceptable NRTL approved overcurrent protection, except as noted below. ADDRESSED
Reference the individual reports for the FABS, OnTrak Synergy Integra and Mirra system for further details concerning the electrical components used within these units.
MEETS (FORMERLY INFORMATION REQUIRED) 11A
At the time of the review, it could not be determined whether the fan provided as part of the additional HEPA filter on the OnTrak unit was NRTL approved. Applied Materials should provide GS3 with information showing that this fan is NRTL approved. Alternately, if the fan is not NRTL approved, it should be replaced by an NRTL approved equivalent or tested to the appropriate standard.
The OnTrak unit with the HEPA filter installed was evaluated, and the HEPA filter fan was found to be acceptable. Reference GS3 Report No. 980094F. Therefore, this item has been reclassified as Meets. MEETS [X] ISSUE [ ] INFO REQUIRED [ ] RESPONDED [ ] N/A[ ] ADD[ ] REF[ ] All wiring is labeled for identification on the origin and termination points. The identification numbers are shown on the schematics for the individual assemblies. MEETS [ ] ISSUE [ ] INFO REQUIRED [ ] RESPONDED [ ] N/A[ ] ADD[X] REF[ ] ADDRESSED The electrical enclosures for the system components have not been altered as a result of their integration into the Mirra Trak system. Reference the individual reports for the FABS, OnTrak Synergy Integra, and Mirra for further information concerning the electrical enclosures for these units. Exception: Overcurrent protection devices need not have MEETS [X] 10,000 AIC (or 14,000 AIC) if they are located on the load side of another overcurrent protection device, mentioned above, with the proper AIC rating. This overcurrent protection device shall be mounted in close proximity to the equipment. ISSUE [ ] INFO REQUIRED [ ] RESPONDED [ ] N/A[ ] ADD[ ] REF[ ] The main circuit breaker provided in the control cabinet has a disconnect rating of 65, 000 AIC and its rating is provided in the installation manual.
The system is configured such that it is provided with two main disconnect switches but a single electrical power feed. The main electrical power from the facility is terminated to a disconnect switch which is mounted in the top of the Mirra unit. The lockable handle for this disconnect switch is located at the front of the Mirra along the extended robot enclosure. The power lines from this switch are then run to the disconnect switch on the main control cabinet. This configuration of multiple disconnect switches is used to provide a means to lockout the power to the unit that is accessible at the tool as the main control cabinet can be located remotely. For both switches, the incoming lines terminate directly to the disconnect switch. MEETS (FORMERLY ISSUE CATEGORY 3 - MODERATE) 11B
The configuration of the disconnects described above is not clearly described in the system manuals. Applied Materials should provide a clear description of this configuration and provide a diagram showing the routing of the wiring. This information should be provided in the installation and maintenance manuals for the Mirra Trak. It is also recommended that this description be provided in the section of the manuals discussing Lockout/tagout of the electrical power to the system. This item has severity rating of 3 (Moderate) based on the potential for confusion when operating or performing maintenance on the system.
Applied Materials has provided updates to the system manual which include a discussion of the configuration of the disconnecting means provided on the system. This discussion provides a clear description of the various optional configurations, as well as warnings to alert personnel that parts of the system may remain energized even though one of the disconnect switches has been actuated. GS3 has reviewed this information and found it to be acceptable; therefore, this item has been reclassified as Meets. Exception 1: Internal power distribution to support MEETS [ ] modules and sub-panels is acceptable; Exception 2: Equipment with more than one feed should be provided with provisions for lockout and be marked with the following text, \(number of feed locations) SOURCES OF SUPPLY PRIOR TO SERVICING\Exception 3: A second power feed may be used when power is supplied from a facilities UPS system to maintain critical equipment system, but not the entire system. Power supplied from an external UPS will be removed when the emergency off circuit is activated or the main equipment breaker is opened. ISSUE [ ] INFO REQUIRED [ ] RESPONDED [ ] N/A[ ] ADD[X] REF[ ] A single power feed is provided to the system and electrical power is distributed from the main control cabinet to the system assemblies. ADDRESSED MEETS [X] ISSUE [ ] INFO REQUIRED [ ] RESPONDED [ ] N/A[ ] ADD[ ] REF[ ] The system is provided with a main nameplate located on the main control cabinet which contains all of the information noted above. - UPS (Uninterruptible Power Supplies) - Applies to UPS MEETS [ ] with outputs greater than 30 volts AC or DC or energy level in excess of 500 volt-amperes and integrated inside equipment footprint. (For additional information, see NFPA 110A). ISSUE [ ] INFO REQUIRED [ ] RESPONDED [ ] N/A[X] ADD[ ] REF[ ] NON-APPLICABLE No UPS抯 are added to the system as a result of the integration of the FABS, OnTrak Synergy Integra, or Mirra unit to assemble the Mirra Trak. Reference the individual reports for these units for more information concerning the use of a UPS. MEETS [ ] ISSUE [ ] INFO REQUIRED [ ] RESPONDED [ ] N/A[ ] ADD[X] REF[ ] ADDRESSED Reference Section for a discussion. MEETS [ ] ISSUE [ ] INFO REQUIRED [ ] RESPONDED [ ] N/A[ ] ADD[X] REF[ ] ADDRESSED Reference Section for a discussion. MEETS [ ] ISSUE [ ] INFO REQUIRED [ ] RESPONDED [ ] N/A[ ] ADD[X] REF[ ] ADDRESSED Reference Section for a discussion. MEETS [ ] ISSUE [ ] INFO REQUIRED [ ] RESPONDED [ ] ADDRESSED Reference Section for a discussion.
N/A[ ] ADD[X] REF[ ]
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