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ESD防静电手册

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Connect tools or fixtures to ESD ground by wires, and make the sure the RTG (Resistance to ground) after grounding is in compliance with specification. (Refer to figure-29)

为将工夹具接上接地线,保证测试设备或夹具符合要求 (参照图-29)

Figure-29 Grounding for DC powered tools/fixtures/图-29 直流用电测试夹具的接地 Notes for Grounding/ 接地注意事项:

1) The grounding wire must be yellow-green wire 接地线要求用国标黄绿双色线

2) Tools or Fixture must be grounded in parallel, but not in series. (E.g. figure-30)

各设备、工夹具接地时要求用并联方式,切不可用串联方式(如图-30)

Figure-30 series grounding /图-30 接地线串联

5.4.11.2.5 Non power consuming tools or fixtures 非用电工夹具

Non power consuming tools or fixtures can’t be grounded by electrical connection, so the tools or fixtures must be dissipative material and or antistatic material 非用电工夹具无法接地时,需要保证夹具材料为静电耗散性或抗静电材料 5.4.12 ESD Work Surface Control/ ESD 工作台管制

(ESD Work surface include the Including Mobile equipment work surface, shelving work surface etc. ESD 工作台包括移动设备工作表面,货架工作表面 等 Reference standard 参考标准: ANSI/ESD S4.1) 5.4.12.1 Test equipment /测试设备:

Mega-ohmmeter or equivalent/ 兆欧表或相似功能的器仪

5.4.12.2 Technical parameter for turnstile as below: 技术参数如下:

5.4.12.3 ESD work surface materials detailed test method as below 防静电工作台面材料的测试方法

5.4.12.3.1 Resistance to ground point 接地测试(Qualification/样品认证): a> Place the sample on a insulative test surface;sample should be cleaned twice by minimum 70% isopropanol-watersolution。

将样品放在绝缘的测试平台上,并使用70%以上酒精进行清洗两次。

b> Insert one probe of the Megohmmeter into grounding point (Figure 31), place electrode at position A, 将兆欧表的一极插入接地插孔中,(如图31 所示)另一极 放在位置A.

c> Read the resistance to ground when the displayed value is stable. 待读数稳定后读出对地电阻值

d> Repeat entire procedure for electrode positions B,C,D,E.

利用接地点对位置 B,C,D,E 进行同样的操作

Figure 31 / 图31

5.4.12.3.2 Resistance to ground point 接地测试( Verification/过程验证) a> Insert one probe of the Megohmmeter into common grounding point ; place electrode at work surface(Figure 32), 将兆欧表的一极接连至接地点,另一极放在工作台面(如图32 所示)

b> Read the resistance to ground when the displayed value is stable. 待读数稳定后读出对地电阻值

Figure 32 / 图32

5.4.12.3.2 Point to point resistance test 点对点测试: a> Place the sample on a insulative test surface 将样品放在绝缘的测试平台上

b> Set the voltage switch of megohmmeter to 100V/将兆欧表电压测试档旋至100伏的 档位.

c> place the electrode at the sample surface as below figure 33, 将测试电极如图33 放置样品表面,

d>read the resistance to ground when the displayed value is stable. 待读数稳定后读出对地电阻值

Figure 33 / 图33

5.4.12.4 ESD work surface should be tested during initial installations and monthly fully coverage check for system resistance

防静电工作台面起始应进行安装检测且每月对静电工作台系统电阻进行全检

5.4.12.5 MBU checks the link of ESD worktable whether is broke and inform FE to maintain it timely.

生产部每班负责检查各防静电工作台的连接是否断开及对松脱的接点通知FE 及时维修, 5.4.12.6 All ESD mat should be labeled with a dedicated NO. The responsible department depends on the actual operation of all segments.

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