MEMS致动器原理 - 图文 

William Tang, Ph.D. EECS Dept., 1990

Formulae

?电场能量：

?静电力：

C

?Energy must include capacitance between the stator and the rotor and the underlying ground plane, which is typically connected at the rotor voltage.

w = t = g = z0 = 2μm Vr =0V

C’= dC/dx

Comb Drive Failure Modes

Example

释放应力