MEMS致动器原理 - 图文 

Scratch Drive Actuator

(SDA)

?SDA operation

?1) Applied voltage bends SDA downward

?2) When released, SDA returns to original shape

?3) Reapplying voltage causes SDA to move a distance ‘dx’

Caveat: sometimes they go backward!

?SDA application

Electrostatic Motors

Torque Motor 的原理

?典型的电极数为： 定子12个，转子8个 ?三相驱动

Ground V A’ W 3W/2 B’ B C G

C’ D V

A W 2W/3 G

固定