¦Ìm£¬»¡Ê¸ÃÖÉ¢°ë¾¶½üËÆÎª1300 ¦Ìm¡£
ÓÉRay aberrationͼ¿ÉÒÔ¿´³ö¼¸ºÎÏñ²î´æÔÚʱµÄ×ÛºÏÃÖÉ¢Çé¿ö£¬»¹¿ÉÒÔ¿´³öÆäËû¶ÀÁ¢¼¸
ºÎÏñ²îµÄ´óС£¬ÈçÓÉԵ㴦ÇúÏßµÄбÂÊ¿ÉÒÔ·´Ó³ÖáÏòÏñ²î·ÖÁ¿£¬ÖîÈçÇò²î¡¢³¡Çú¡¢Àë½¹µÄ´óС£¬Í¼1.9ÖбíÃ÷Ŀǰ³õʼ½á¹¹µÄ³¡Çú½Ï´ó£»ÔÙÈçÓÉÇúÏß±ßÔµ¿×¾¶£¨¡À1.0£©´¦µÄY-aberrationÖ®ºÍ£¬Äܹ»·´Ó³»Û²î´óС£»Èç¹û¹¤×÷²¨³¤ÊÇÒ»¹âÆ×¶Î£¬Ã¿Ò»ÊÓ³¡µÄRay aberrationÇúÏßÖÐÿһ·ùͼÓÐÈý¸ùÇúÏߣ¬·´Ó³²¨³¤ÐòºÅΪ1,2,3µÄRay aberrationÊý¾Ý¡£ÕâÑùRay aberrationÇúÏßÖУ¬1,3²¨³¤µÄÇúÏßÓëEYÖáµÄ½»µãÖ®²î·´Ó³´¹ÖáÉ«²îµÄ´óС¡£Ëæ×ÅÊÓ³¡µÄ±ä»¯£¬¿ÉÒÔÇå³þ´¹ÖáÉ«²îµÄ±ä»¯¡£
ͼ 1.9 ǰÀýRay aberrationÇúÏß
Èç¹ûÔÚRay aberrationÇúÏß´°¿ÚÖУ¬Ñ¡ÔñSetting»òÔÚÈÎһλÖã¬ÓÒ»÷Êó±ê£¬½«µ¯³öÉèÖöԻ°¿ò£¬¶Ô»°¿òÖÐÑ¡ÏîµÄº¬Òå²Î¼û±í1.2¡£
±í1.2 ÀýÌâµÄ³õʼ½á¹¹²ÎÊý
Ñ¡ Ïî Plot Scale
º¬ Òå
»æÍ¼±ÈÀý£¬ÊäÈëµÄÊýÖµÓÃÓÚ¶¨Òå×ÝÖá°ëÖ᳤¶È£¬µ¥Î»£º¦Ìm£»ÊýֵԽС£¬ÇúÏß±»·Å´ó£»ÊýÖµÔ½´ó£¬ÇúÏß±»Ñ¹Ëõ£¬0±íʾÕý°ëÖá×î´óÊýÖµ×Ô¶¯Ñ¡¶¨¡£
Number of Rays Wavelength Field
×ÓÎç»ò»¡Ê¸ÃæÖ÷¹âÏßÁ½²à×·¼£µÄ¹âÏßÊýÄ¿ ²¨³¤ÐòºÅÑ¡ÏAll±íʾȫѡ ÊÓ³¡£¬All±íʾȫѡ
11
Tangential ÿһÊÓ³¡×ó±ßÇúÏß×ÝÖáÏñ²îµÄÑ¡ÏÓÐX-aberrationºÍY-aberrationÁ½ÖÖ£¬Èç¹ûÑ¡X-aberration£¬×ÝÖá±äΪEX£¬·ñÔòEY
Sagital ÿһÊÓ³¡ÓÒ±ßÇúÏß×ÝÖáÏñ²îµÄÑ¡ÏÓÐX-aberrationºÍY-aberrationÁ½ÖÖ£¬Èç¹ûÑ¡X-aberration£¬×ÝÖá±äΪEX£¬·ñÔòEY
Use Dashes Check apertures Vignetted Pupil
Ñ¡ÖУ¬ÇúÏßÒÔºÚ°×ÐéÏß±íʾ
Ñ¡ÖУ¬Ôò¼ì²é¹âÏßÊÇ·ñÔÚÿ¸ö¹âÑ§ÃæÉϵÄÓÐЧͨ¹â¿×¾¶ÄÚ Ñ¡ÖУ¬ÔòºáÖá1.0±íʾÖáÉÏÎïµãµÄ¹âֱͫ¾¶£¬¶Ô´óÊÓ³¡¹âѧϵͳ£¬Èç´æÔÚ½¥ÔΣ¬ÔòÖáÍâÊÓ³¡µÄRay aberrationÇúÏßÖкáÖáȡֵ»áСÓÚ1.0£¬Äܹ»Ã÷ÏÔ·´Ó³½¥ÔÎÏÖÏó£»È粻ѡ£¬ºáÖá1.0¿ÉÒÔ±íʾ½¥ÔÎʱ¹âÍ«¹éÒ»»¯¿×¾¶£¬È¡Öµ´Ó0~1.0£¬ÇúÏß·´Ó³²»³ö½¥ÔÎÏÖÏó¡£´Ëʱ£¬0ÊÓ³¡ÓëÖáÍâÊÓ³¡ÇúÏßÖкáÖá1.0±íʾ¾ø¶Ô¿×¾¶³¤¶ÈÊDz»µÈµÄ
?
Optical path
ÏÔʾµÄ¹âÍ«¹éÒ»»¯×ø±ê£¨PX,PY£©ÎªºáÖáµÄ¹â³Ì²îÇúÏߣ¬Ï൱ÓÚһά²¨²îÇúÏߣ¬×ÝÖáΪ¹â³Ì²î£¬ÒÔÖ÷¹âÏßËù×ß¹ýµÄ¹â³ÌΪ»ù×¼¡£
?
Pupil Aberration
·´Ó³¹âÍ«Ïñ²î¡£±íʾʵ¼ÊÖ÷¹âÏßÓë¹âÍ«Ãæ½»µã£¬À뿪¸ß˹Ö÷¹âÏßÓë¹âÍ«Ãæ½»µãµÄ¾àÀ룬һ°ãÓÃÕ¼¹âÍ«°ë¾¶µÄ°Ù·ÖÊý±íʾ£¬Í¼1.10¸ø³öÁË1.3½ÚÀýÎïÔÚ1000 mm´¦³õʼ½á¹¹µÄ¹âÍ«Ïñ²îÇúÏߣ¬ÓɸÃͼ¿´³ö£¬ÓÉÓÚÎïλÓÚ×ÓÎçÃæÄÚ£¬ÔÚ×ÓÎçÃæÄÚ´æÔÚÃ÷ÏԵĹâÍ«Ïñ²î£¬±íʾÖáÍâ¹âͫƫÐÄ¡£´Ëʱ£¬Èç²»Ïû³ý¹âÍ«Ïñ²î£¬»áÓ°Ïì¸÷ÖÖÖáÍâÏñ²îÖµµÄ¾«È·¼ÆË㣬ÈçÑ¡¡°System¡úGeneral¡¡úRay Aiming¡úAiming to aberration (real) stop height¡±£¬Ôò¿ÉÒԺܺõØÏû³ý¹âÍ«Ïñ²î¡£
ͼ1.10 1.3½ÚÖÐÀýÔÚ1000mm´¦³õʼ½á¹¹µÄPupil Aberration
12
2. Stop Diagrams£¨¼¸ºÎµãÁÐͼ£©
Ray aberration½öÄÜ·´Ó³×ÓÎç¡¢»¡Ê¸ÃæÄÚ¹âÏßÔì³ÉÏñµÄÃÖÉ¢Çé¿ö£¬¼¸ºÎµãÁÐͼÔòÄÜ·´Ó³ÈÎÒ»Îïµã·¢³öµÄ³äÂúÈëÍ«µÄ¹â×¶£¬ÔÚÏñÃæÉϵĽ»µãÃÖÉ¢Çé¿ö¡£
¼¸ºÎµãÁÐͼͨ³£ÒÔÖ÷¹âÏßÓëÏñÃæ½»µãΪԵ㣬½øÐÐÁ¿»¯¼ÆËãµãÁÐͼµÄÃÖÉ¢Çé¿ö£¬ZEMAXÔÚ´Ë»ù´¡ÉÏ£¬»¹¸ø³öÒÔÐéÄâµÄ¡°ÖÊÐÄ¡±¡¢¡°Æ½¾ù¡±ÎªÔµãµÄÁ¿»¯µãÁÐͼ¡£
ͼ1.11±íʾÁË1.3½ÚÀý×ÓÎïÔÚ1000mm´¦³õʼ½á¹¹µÄÏñÃæµãÁÐͼ¡£Ê¹ÓõãÁÐͼµÄÆÀ¼ÛÏñÖÊ£¬³ýÁ˹۲ìµãÁÐͼÐÎ×´Í⣬һ°ã»¹Ê¹ÓÃÁ½¸öÖ¸±ê£¬¼´£¬Èçͼ1.11Ï·½µÄRMS RadiusÓëGEO Radius£¬µ¥Î»Ò»°ãÈÔΪ ¦Ìm¡£Ç°Õß±íʾµãÁÐͼÃÖÉ¢µÄʵ¼Ê¼¸ºÎ°ë¾¶¡£ÓÐʱÈç½öÓÐÁ½¸ù¹âÏßÓëÏñÃæ½»µãÉ¢µÄÀ÷º¦£¬¶øÆäËû¹âÏß·Ö²¼±È½Ï¼¯ÖУ¬¼´RMS Radius½ÏС£¬¶øGEO Radius½Ï´ó£¬ÈÔÈÏΪÏñÖʱÈRMS RadiusÖµ½Ï´óʱºÃһЩ¡£
¹ýÈ¥ÔÚÉè¼ÆÊ¹Óýº¾íµÄÕÕÏàÎᄉʱ£¬³£ÓõãÁÐͼ½øÐÐÏñÖÊÆÀ¼Û£¬Èç¹ûÿһÊÓ³¡µãÁÐͼµÄRMS RadiusСÓÚ15 ¦Ìm£¬Ôò¿ÉÈÏΪÉè¼ÆÖеÄÕÕÏàÎᄉϵͳÒѾ¾ßÓнϺõÄÏñÖÊ¡£
ͼ1.11Öиø³öÁËÈý¸öÊÓ³¡µÄµãÁÐͼÇé¿ö£¬ÓɵãÁÐͼµÄͼ°¸¼°RMS Radius¡¢Geo RadiusÖµÒ²¿ÉÒÔ¹ÀËã¶ÀÁ¢¼¸ºÎÏñ²î´óС£¬¼´¿ÉÅжÏÊÇʲôÑùµÄÏñ²îÓ°ÏìµãÁÐͼµÄ½¥Ð¡¡£Èç´Óͼ1.11ÖпÉÒÔÃ÷ÏԵؿ´³ö³¡ÇúÓëÏñÉ¢ÊǸóõʼ½á¹¹Ö÷Òª´æÔڵļ¸ºÎÏñ²î¡£
ͼ1.11 1.3½ÚÀýÎïÔÚ1000mm´¦³õʼ½á¹¹µÄµãÁÐͼ
µãÁÐͼ£¨Spot Diagrams£©µÄ±íÏÖÐÎʽÓÐÎåÖÖ£º±ê×¼µãÁÐͼ£¨Standard£©¡¢Àë½¹µãÁÐͼ£¨Through Focus£©¡¢·´Ó³ÊÓ³¡Ïñ¸ßµÄµãÁÐͼ£¨Full Field Spot Diagrams£©¡¢ËæÊÓ³¡Ó벨³¤±ä»¯µÄµãÁÐÕóͼ£¨Matrix Spot Diagrams£©¡¢ËæÊÓ³¡Óë¶àÖØ½á¹¹±ä»¯µÄµãÁÐÕóͼ£¨Configuration Matrix Spot Diagrams£©¡£Æä
13
Öг£ÓõÄÊDZê×¼µãÁÐͼ¡£
¸ù¾ÝÏñÖÊÆÀ¼Û¼¼Êõ£¬¼ÆËãµãÁÐͼʱÈëÍ«ÉϹâÏßµÄѡȡÓÐÒÔϼ¸ÖÖ·½·¨£º¼«¾¶¡¢¼«½Ç»®·ÖµÄ¼«×ø±êÐÎʽ£¬ÔÚZEMAXÖгÆÎªhexapolar£¨Áù¼«£©£»ÓÐÖ±½Ç×ø±êÍø¸ñ»®·ÖµÄ·½ÐÎÍø¸ñ£¨Square£©£»ZEMAXÖл¹ÌṩÁË»ùÓÚÎ±Ëæ»ú·½·¨µÄ²ü¶¶Ê½£¨dithered£©¹âÍ«»®·Ö·½·¨¡£
ÈçÔÚµãÁÐͼÉèÖã¨Setting£©ÖеÄSurface numberÓÉÏñÃæ¸Ä±ä³ÉÆäËû¹âÑ§ÃæÐòºÅ£¬´ËʱµãÁÐͼ·´Ó³¹âÏßÓë¹âÑ§ÃæµÄ½»µã·Ö²¼£¬Ò²·´Ó³¹âÑ§ÃæµÄͨ¹âÇé¿ö£»È罫Surface numberÉèÖóɹâÀ»ÃæÐòºÅ£¬Ôò´ËʱµãÁÐͼ¿É·´Ó³¹âÀ»Í¨¹âÃæµÄÐÎ×´£¬ÈçÖáÍâ¹âÀ»ÃæµãÁÐͼ·Ö²¼ÎªÍÖÔ²ÐÎ×´£¬Ôò±íʾ½¥ÔÎÏÖÏó£¬Í¼1.12¸ø³öÁËÕâÑùµÄµãÁÐͼ¡£
ͼ 1.12 ·´Ó³½¥ÔÎÏÖÏóµÄ¿×¾¶¹âÀ»µãÁÐͼ
3. MTF£¨µ÷ÖÆ´«µÝº¯Êý£©
MTFÊÇĿǰʹÓÃ±È½ÏÆÕ±éµÄÒ»ÖÖÏñÖÊÆÀ¼ÛÖ¸±ê£¬³ÆÎªµ÷ÖÆ´«µÝº¯Êý¡£Ëü¼ÈÓë¹âѧϵͳµÄÏñ²îÓйأ¬ÓÖÓë¹âѧϵͳµÄÑÜÉäЧ¹ûÓйأ¬Êǹâѧ´«µÝº¯Êý£¨OTF£©µÄÄ££¬ÇúÏߺáÖá±íʾÏñÃæÉÏµÄ¿Õ¼äÆµÂÊ£¬µ¥Î»£º1/mm£¬¼´Ã¿ºÁÃ×¶àÉÙÏß¶Ô£¬×ÝÖá±íʾ¶ÔÕâЩºÚ°×ϸʵÏßÎï·Ö±æµÄµ÷ÖÆ¶È¡£ ÈκÎÒ»ÖÖÎïÐÅÏ¢£¬¶¼¿ÉÒÔϸ·Öµ½µã£¬Ò²¿ÉÒÔϸ·Öµ½Ïߣ¬µ÷ÖÆ´«µÝº¯Êý£¨MTF£©µÄÎïÀíÒâÒåÊÇ£ºÓ¦ÓøµÁ¢Ò¶±ä»»ÔÀíÓë¹âѧϵͳÏà¸É³ÉÏñÀíÂÛ£¬¼ÆËã³ö¾µÍ·¶ÔÖð½¥±äϸµÄºÚ°×Ïß¶Ô·Ö±æµÄµ÷ÖÆ¶È¡£
¸ù¾Ý¼ÆËãÄ£Ð͵IJ»Í¬£¬MTF·ÖΪÈýÀࣺ
£¨1£© FFT MTF£»ùÓÚ¿ìËÙ¸µÁ¢Ò¶±ä»»£¬ÏȼÆËãPSF£¨µãÀ©É¢º¯Êý£©£¬ÔÙÓÉPSF ¡ú MTF£» £¨2£© Huygens MTF£»ùÓڻݸüË¹Ãæ°üÂçÔÀí£¬ÏȼÆËãŒçÍ«ÃæÉϵĹâÍ«º¯Êý£¬È»ºó°ÑŒçÍ«
ÃæÏ¸·Ö£¬¿´³É´Î¼¶¹âÔ´£¬ÔÚÏòÏñÃæ´«µÝ£»Òò´Ë¼ÆËã»Ý¸ü˹´«º¯Ê±£¬Òª½«³öÍ«ÃæÏ¸·ÖÍø¸ñ¡¢Ò²½«ÏñÃæÏ¸·ÖÍø¸ñ²ÉÑù£»
£¨3£© ¼¸ºÎMTF£»ùÓÚ¼¸ºÎµãÁÐͼ£¬×ª»¯³É×ÓÎçÃæ»ò»¡Ê¸ÃæÉϵÄÏßÀ©É¢º¯Êý£¬ÔÙ¾¸µÁ¢
Ò¶±ä»»£¬µÃµ½µ÷ÖÆ´«µÝº¯Êý¡£
14
Ïà¹ØÍÆ¼ö£º