Nanolithography and manipulation of graphene using an atomic force microscope

We use an atomic force microscope (AFM) to manipulate graphene films on a nanoscopic length scale. By means of local anodic oxidation with an AFM we are able to structure isolating trenches into single-layer and few-layer graphene flakes, opening the possi

Nanolithography and manipulation of graphene using an atomic

force microscope

A.J.M. Giesbersa*, U. Zeitlera , S. Neubeckb, F. Freitagb, K.S. Novoselovb, and J.C. Maana aHigh Field Magnet Laboratory, Institute for Molecules and Materials, Radboud University

Nijmegen, Toernooiveld 7, 6525 ED Nijmegen, The Netherlands.

bDepartment of Physics, University of Manchester, M13 9PL, Manchester, UK.

(05 May 2008)

Abstract

We use an atomic force microscope (AFM) to manipulate graphene films on a nanoscopic length scale. By means of local anodic oxidation with an AFM we are able to structure isolating trenches into single-layer and few-layer graphene flakes, opening the possibility of tabletop graphene based device fabrication. Trench sizes of less than 30 nm in width are attainable with this technique. Besides oxidation we also show the influence of mechanical peeling and scratching with an AFM of few layer graphene sheets placed on different substrates.

PACS: 07.79.Lh; 81.16.-c

Keywords: A. Graphene; E. Nanolithography; E. Atomic force microscopy

*

Electronic mail: J.Giesbers@science.ru.nl Electronic mail: U.Zeitler@science.ru.nl

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