Nanolithography and manipulation of graphene using an atomic force microscope(2)

We use an atomic force microscope (AFM) to manipulate graphene films on a nanoscopic length scale. By means of local anodic oxidation with an AFM we are able to structure isolating trenches into single-layer and few-layer graphene flakes, opening the possi

1. Introduction

Carbon is one of the most intensively studied materials in solid state physics. Starting with research activities on graphite six decades ago [1] research on carbon continued to be attractive by the discovery of new carbon allotropes such as Buckminster fullerenes [2], carbon nanotubes

[3] and the recent fabrication of isolated single-layers of carbon atoms, graphene [4, 5]. Due to the unique electronic properties and high crystal quality of graphene this discovery triggered a great deal of attention in the following years [6]. Besides its fundamental physical properties, the large charge carrier mobilities of up to 200,000 cm2/Vs [7, 8] (two orders of magnitude larger than silicon MOSFETs) also make graphene a promising candidate for integrated electronic circuitries. Due to its planar geometry it can be integrated rather straightforwardly into the current silicon technology and pave the way for interesting novel nano-electronic devices based on e.g. relativistic p-n junctions [9, 10], size-quantized nano ribbons [11–13] or quantum dots

[14, 15].

Currently, most graphene devices are fabricated using state-of the art nanofabrication techniques based on electron beam lithography and subsequent reactive plasma edging. A promising alternative method for the fabrication of proof-of-principle devices may be provided by scanning probe techniques, and, more specifically by AFM-lithography. For traditional semiconductors it was indeed already shown successfully that an atomic force microscope (AFM) can be used to create electronic nanostructures by means of mechanical ploughing [16, 17] or local anodic oxidation [21, 22] providing a table-top method for the fabrication of e.g. quantum point contacts [17, 19], quantum dots [17, 20, 21] and phase coherent quantum rings

[22].

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