东芝电子可靠性测试
1. What is Reliability Testing
1.1
Significance and Purpose of Reliability Testing
The purpose of semiconductor device reliability testing is primarily to ensure that shipped devices, after assembly and adjustment by the customer, exhibit the desired lifetime, functionality and performance in the hands of the end user.
Nevertheless, there are constraints of time and money. Because semiconductor devices require a long lifetime and low failure rate, to test devices under actual usage conditions would require a great amount of test time and excessively large sample sizes.
The testing time is generally shortened therefore by accelerating voltage, temperature and humidity. In addition, statistical sampling is used, taking into account the similarities between process and design, so as to optimize the number of test samples.
Toshiba performs various reliability testing during new product development following the stages shown in Table 1.1. In recent years, customer demand for shorter development-to-shipment times, and the increasing advancement and complexity of semiconductor devices, has made failure analysis extremely difficult. Consequently, evaluation of basic failure mechanisms must begin in the development phase, dividing products into different test element groups (TEG), such as process TEG and design TEG.
To verify product reliability, various lifetime and environment tests – a process referred to as design approval testing (DAT) – ensure that the required specifications and quality/reliability targets are met.
During mass production, devices are made under strict manufacturing control and screening to eliminate those with a potential for failure and ensure higher reliability. In addition, initial inspections of product characteristics and periodic reliability monitoring are used to assess whether or not the product quality level remains high. Tests are carried out with high efficiency and focus by classifying assessment levels according to product innovation and importance, and defining test items and assessment standards accordingly.
The various reliability testing described above, through problem identification and correction at each phase of device development, is used to provide customers with a level of reliability that ensures safe product use, and to maintain and improve reliability in the manufacturing phase as well.
1.2 Before Testing
The following points must be considered before implementing reliability tests in order to satisfy the objectives described above:
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